Waveguide microcavity based on photonic microstructures

Thomas Fraser Krauss, BV Voegele, CR Stanley, RM DeLaRue

Research output: Contribution to journalArticlepeer-review

78 Citations (Scopus)


A waveguide based microcavity exhibiting a quality factor Q approximate to 2500 has been realized by incorporating a lambda/4 phase shift into a 1-D photonic microstructure. The microstructure has an overall length of 3 mu m, consists of a deeply etched grating with very narrow (75 nm) air-gaps and exhibits a third-order stop band in the 800-900 nm wavelength regime, A comparison between measurement and simulation suggests that there is a thin (approximately 18 nm) skin of oxidized material at the etched semiconductor-air interfaces.

Original languageEnglish
Pages (from-to)176-178
Number of pages3
JournalIEEE Photonics Technology Letters
Publication statusPublished - Feb 1997


  • gratings
  • integrated optics
  • microcavity
  • photonic microstructures
  • semiconductor waveguides


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