Tunable optical filters based on silicon nitride mem-branes with subwavelength gratings

Y. Wang; D. Stellinga; T. F. Krauss

doi:10.1109/OMN.2014.6924515

Tunable optical filters based on silicon nitride mem-branes with subwavelength gratings

Y. Wang, D. Stellinga, T. F. Krauss

School of Physics and Astronomy

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	2014 International Conference on Optical MEMS and Nanophotonics (OMN)
Pages	13-14
Number of pages	2
DOIs	https://doi.org/10.1109/OMN.2014.6924515
Publication status	Published - 1 Aug 2014

Keywords

diffraction gratings
membranes
micro-optics
micromechanical devices
mirrors
optical filters
optical resonators
optical tuning
reflectivity
silicon compounds
Fabry-Perot cavity architecture
SiN
electrostatic tuning
high contrast grating
high reflective broad-band filter
high-reflectivity mirror
orange-red spectral range
size 500 nm
subwavelength gratings
thick silicon nitride membrane
tunable optical filters
voltage 9 V
Biomembranes
Gratings
Mirrors
Optical filters
Reflectivity
Scanning electron microscopy
Silicon nitride

Access to Document

10.1109/OMN.2014.6924515

Challening the Limits of Photonics: stru: Challenging the Limits of Photonics: Structured Light
Dholakia, K. (PI), Krauss, T. F. (CoI) & Samuel, I. D. W. (CoI)
EPSRC
1/06/12 → 31/05/17
Project: Standard

Cite this

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title = "Tunable optical filters based on silicon nitride mem-branes with subwavelength gratings",

keywords = "diffraction gratings, membranes, micro-optics, micromechanical devices, mirrors, optical filters, optical resonators, optical tuning, reflectivity, silicon compounds, Fabry-Perot cavity architecture, SiN, electrostatic tuning, high contrast grating, high reflective broad-band filter, high-reflectivity mirror, orange-red spectral range, size 500 nm, subwavelength gratings, thick silicon nitride membrane, tunable optical filters, voltage 9 V, Biomembranes, Gratings, Mirrors, Optical filters, Reflectivity, Scanning electron microscopy, Silicon nitride",

author = "Y. Wang and D. Stellinga and Krauss, {T. F.}",

year = "2014",

month = aug,

day = "1",

doi = "10.1109/OMN.2014.6924515",

language = "Undefined/Unknown",

pages = "13--14",

booktitle = "2014 International Conference on Optical MEMS and Nanophotonics (OMN)",

}

TY - GEN

T1 - Tunable optical filters based on silicon nitride mem-branes with subwavelength gratings

AU - Wang, Y.

AU - Stellinga, D.

AU - Krauss, T. F.

PY - 2014/8/1

Y1 - 2014/8/1

KW - diffraction gratings

KW - membranes

KW - micro-optics

KW - micromechanical devices

KW - mirrors

KW - optical filters

KW - optical resonators

KW - optical tuning

KW - reflectivity

KW - silicon compounds

KW - Fabry-Perot cavity architecture

KW - SiN

KW - electrostatic tuning

KW - high contrast grating

KW - high reflective broad-band filter

KW - high-reflectivity mirror

KW - orange-red spectral range

KW - size 500 nm

KW - subwavelength gratings

KW - thick silicon nitride membrane

KW - tunable optical filters

KW - voltage 9 V

KW - Biomembranes

KW - Gratings

KW - Mirrors

KW - Optical filters

KW - Reflectivity

KW - Scanning electron microscopy

KW - Silicon nitride

U2 - 10.1109/OMN.2014.6924515

DO - 10.1109/OMN.2014.6924515

M3 - Conference contribution

SP - 13

EP - 14

BT - 2014 International Conference on Optical MEMS and Nanophotonics (OMN)

ER -

Tunable optical filters based on silicon nitride mem-branes with subwavelength gratings

Keywords

Access to Document

Projects

Challening the Limits of Photonics: stru: Challenging the Limits of Photonics: Structured Light

Cite this