Towards integrated position sensors with nanometer precision

S.A. Schulz*, P. Beck, L.C. Wynne, S. Iadanza, L. O'Faolain, P. Banzer

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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The ability to precisely measure the displacement between two elements, e.g. a mask and a substrate or a beam and optical elements, is fundamental to many precision experiments and processes. Yet typical optical displacement sensors struggle to go significantly below the diffraction limit. Here we combine advances in our understanding of directional scattering from nanoparticles with silicon photonic waveguides to demonstrate a displacement sensor with deep subwavelength accuracy. Depending on the level of integration and waveguide geometry used we achieve a spatial resolution between 5 − 7 nm, equivalent to approximately λ/200 − λ/300.
Original languageEnglish
Title of host publicationEmerging applications in silicon photonics III
EditorsCallum G. Littlejohns, Marc Sorel
Place of PublicationBellingham, WA
Number of pages4
ISBN (Electronic)9781510657410
ISBN (Print)9781510657403
Publication statusPublished - 11 Jan 2023
EventEmerging Applications in Silicon Photonics III - Birmingham, United Kingdom
Duration: 6 Dec 20229 Dec 2022

Publication series

NameProceedings of SPIE
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceEmerging Applications in Silicon Photonics III
Country/TerritoryUnited Kingdom
Internet address


  • Directional scattering
  • Integrated optics
  • Photonic integrated circuits
  • Sensors
  • Silicon photonics


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