Towards integrated position sensors with nanometer precision

S.A. Schulz; P. Beck; L.C. Wynne; S. Iadanza; L. O'Faolain; P. Banzer

doi:10.1117/12.2644959

Towards integrated position sensors with nanometer precision

S.A. Schulz^*, P. Beck, L.C. Wynne, S. Iadanza, L. O'Faolain, P. Banzer

^*Corresponding author for this work

School of Physics and Astronomy

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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Abstract

The ability to precisely measure the displacement between two elements, e.g. a mask and a substrate or a beam and optical elements, is fundamental to many precision experiments and processes. Yet typical optical displacement sensors struggle to go significantly below the diffraction limit. Here we combine advances in our understanding of directional scattering from nanoparticles with silicon photonic waveguides to demonstrate a displacement sensor with deep subwavelength accuracy. Depending on the level of integration and waveguide geometry used we achieve a spatial resolution between 5 − 7 nm, equivalent to approximately λ/200 − λ/300.

Original language	English
Title of host publication	Emerging applications in silicon photonics III
Editors	Callum G. Littlejohns, Marc Sorel
Place of Publication	Bellingham, WA
Publisher	SPIE
Number of pages	4
ISBN (Electronic)	9781510657410
ISBN (Print)	9781510657403
DOIs	https://doi.org/10.1117/12.2644959
Publication status	Published - 11 Jan 2023
Event	Emerging Applications in Silicon Photonics III - Birmingham, United Kingdom Duration: 6 Dec 2022 → 9 Dec 2022 https://spie.org/PX22/conferencedetails/emerging-applications-in-silicon-photonics?SSO=1

Publication series

Name	Proceedings of SPIE
Volume	12334
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Emerging Applications in Silicon Photonics III
Country/Territory	United Kingdom
City	Birmingham
Period	6/12/22 → 9/12/22
Internet address	https://spie.org/PX22/conferencedetails/emerging-applications-in-silicon-photonics?SSO=1

Keywords

Directional scattering
Integrated optics
Photonic integrated circuits
Sensors
Silicon photonics

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10.1117/12.2644959

Schulz-2023-Towards-integrated-position-sensors-ProcSPIE-1233405
Copyright © 2023 SPIE. This work has been made available online in accordance with publisher policies or with permission. Permission for further reuse of this content should be sought from the publisher or the rights holder. This is the final published version of the work, which was originally published at https://doi.org/10.1117/12.2644959.
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Cite this

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title = "Towards integrated position sensors with nanometer precision",

abstract = "The ability to precisely measure the displacement between two elements, e.g. a mask and a substrate or a beam and optical elements, is fundamental to many precision experiments and processes. Yet typical optical displacement sensors struggle to go significantly below the diffraction limit. Here we combine advances in our understanding of directional scattering from nanoparticles with silicon photonic waveguides to demonstrate a displacement sensor with deep subwavelength accuracy. Depending on the level of integration and waveguide geometry used we achieve a spatial resolution between 5 − 7 nm, equivalent to approximately λ/200 − λ/300.",

keywords = "Directional scattering, Integrated optics, Photonic integrated circuits, Sensors, Silicon photonics",

author = "S.A. Schulz and P. Beck and L.C. Wynne and S. Iadanza and L. O'Faolain and P. Banzer",

year = "2023",

month = jan,

day = "11",

doi = "10.1117/12.2644959",

language = "English",

isbn = "9781510657403 ",

series = "Proceedings of SPIE",

publisher = "SPIE",

editor = "Littlejohns, {Callum G.} and Marc Sorel",

booktitle = "Emerging applications in silicon photonics III",

address = "United States",

note = "Emerging Applications in Silicon Photonics III ; Conference date: 06-12-2022 Through 09-12-2022",

url = "https://spie.org/PX22/conferencedetails/emerging-applications-in-silicon-photonics?SSO=1",

}

Schulz, SA, Beck, P, Wynne, LC, Iadanza, S, O'Faolain, L & Banzer, P 2023, Towards integrated position sensors with nanometer precision. in CG Littlejohns & M Sorel (eds), Emerging applications in silicon photonics III., 1233405 , Proceedings of SPIE, vol. 12334, SPIE, Bellingham, WA, Emerging Applications in Silicon Photonics III, Birmingham, United Kingdom, 6/12/22. https://doi.org/10.1117/12.2644959

TY - GEN

T1 - Towards integrated position sensors with nanometer precision

AU - Schulz, S.A.

AU - Beck, P.

AU - Wynne, L.C.

AU - Iadanza, S.

AU - O'Faolain, L.

AU - Banzer, P.

PY - 2023/1/11

Y1 - 2023/1/11

N2 - The ability to precisely measure the displacement between two elements, e.g. a mask and a substrate or a beam and optical elements, is fundamental to many precision experiments and processes. Yet typical optical displacement sensors struggle to go significantly below the diffraction limit. Here we combine advances in our understanding of directional scattering from nanoparticles with silicon photonic waveguides to demonstrate a displacement sensor with deep subwavelength accuracy. Depending on the level of integration and waveguide geometry used we achieve a spatial resolution between 5 − 7 nm, equivalent to approximately λ/200 − λ/300.

AB - The ability to precisely measure the displacement between two elements, e.g. a mask and a substrate or a beam and optical elements, is fundamental to many precision experiments and processes. Yet typical optical displacement sensors struggle to go significantly below the diffraction limit. Here we combine advances in our understanding of directional scattering from nanoparticles with silicon photonic waveguides to demonstrate a displacement sensor with deep subwavelength accuracy. Depending on the level of integration and waveguide geometry used we achieve a spatial resolution between 5 − 7 nm, equivalent to approximately λ/200 − λ/300.

KW - Directional scattering

KW - Integrated optics

KW - Photonic integrated circuits

KW - Sensors

KW - Silicon photonics

UR - https://doi.org/10.1117/12.2670980

U2 - 10.1117/12.2644959

DO - 10.1117/12.2644959

M3 - Conference contribution

SN - 9781510657403

T3 - Proceedings of SPIE

BT - Emerging applications in silicon photonics III

A2 - Littlejohns, Callum G.

A2 - Sorel, Marc

PB - SPIE

CY - Bellingham, WA

T2 - Emerging Applications in Silicon Photonics III

Y2 - 6 December 2022 through 9 December 2022

ER -

Towards integrated position sensors with nanometer precision

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Keywords

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