Test structures for the characterization of MEMS and CMOS integration technology
- Huamao Lin*
- , Anthony J. Walton
- , Camelia C. Dunare
- , J. Tom M. Stevenson
- , Alan M. Gundlach
- , Stewart Smith
- , Andrew S. Bunting
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review