Test structures for characterizing the integration of EWOD and SAW technologies for microfluidics

Yifan Li; Richard Yongqing Fu; D. Winters; Brian W. Flynn; Bill Parkes; Douglas Stuart Brodie; Yufei Liu; Jonathan Terry; Les I. Haworth; A. S. Bunting; J. T.M. Stevenson; Stewart Smith; C. Logan MacKay; Pat R.R. Langridge-Smith; Adam A. Stokes; Anthony J. Walton

doi:10.1109/TSM.2012.2202770

Test structures for characterizing the integration of EWOD and SAW technologies for microfluidics

Yifan Li^*, Richard Yongqing Fu, D. Winters, Brian W. Flynn, Bill Parkes, Douglas Stuart Brodie, Yufei Liu, Jonathan Terry, Les I. Haworth, A. S. Bunting, J. T.M. Stevenson, Stewart Smith, C. Logan MacKay, Pat R.R. Langridge-Smith, Adam A. Stokes, Anthony J. Walton

^*Corresponding author for this work

School of Physics and Astronomy

Research output: Contribution to journal › Article › peer-review

Abstract

This paper presents details of the design and fabrication of test structures specifically designed for the characterization of two distinct digital microfluidic technologies: electro-wetting on dielectric (EWOD) and surface acoustic wave (SAW). A test chip has been fabricated that includes structures with a wide range of dimensions and provides the capability to characterize enhanced droplet manipulation, as well as other integrated functions. The EWOD and SAW devices have been separately characterized first of all to determine whether integration of the technologies affects their individual performance, including device lifetime evaluation. Microfluidic functions have then been demonstrated, including combined EWOD/SAW functions. In particular, this paper details the use of EWOD to anchor droplets, while SAW excitation is applied to perform mixing. The relationship between test structure designs and the droplets anchoring performance has been studied.

Original language	English
Article number	6212373
Pages (from-to)	323-330
Number of pages	8
Journal	IEEE Transactions on Semiconductor Manufacturing
Volume	25
Issue number	3
DOIs	https://doi.org/10.1109/TSM.2012.2202770
Publication status	Published - 13 Aug 2012

Keywords

Contact angle
electro-wetting on dielectric (EWOD)
integration
surface acoustic wave (SAW)
test structure

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10.1109/TSM.2012.2202770

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Li, Y., Fu, R. Y., Winters, D., Flynn, B. W., Parkes, B., Brodie, D. S., Liu, Y., Terry, J., Haworth, L. I., Bunting, A. S., Stevenson, J. T. M., Smith, S., MacKay, C. L., Langridge-Smith, P. R. R., Stokes, A. A., & Walton, A. J. (2012). Test structures for characterizing the integration of EWOD and SAW technologies for microfluidics. IEEE Transactions on Semiconductor Manufacturing, 25(3), 323-330. Article 6212373. https://doi.org/10.1109/TSM.2012.2202770

@article{6a11cf97763740fb8a84d2a3cd0a82e9,

title = "Test structures for characterizing the integration of EWOD and SAW technologies for microfluidics",

abstract = "This paper presents details of the design and fabrication of test structures specifically designed for the characterization of two distinct digital microfluidic technologies: electro-wetting on dielectric (EWOD) and surface acoustic wave (SAW). A test chip has been fabricated that includes structures with a wide range of dimensions and provides the capability to characterize enhanced droplet manipulation, as well as other integrated functions. The EWOD and SAW devices have been separately characterized first of all to determine whether integration of the technologies affects their individual performance, including device lifetime evaluation. Microfluidic functions have then been demonstrated, including combined EWOD/SAW functions. In particular, this paper details the use of EWOD to anchor droplets, while SAW excitation is applied to perform mixing. The relationship between test structure designs and the droplets anchoring performance has been studied.",

keywords = "Contact angle, electro-wetting on dielectric (EWOD), integration, surface acoustic wave (SAW), test structure",

author = "Yifan Li and Fu, {Richard Yongqing} and D. Winters and Flynn, {Brian W.} and Bill Parkes and Brodie, {Douglas Stuart} and Yufei Liu and Jonathan Terry and Haworth, {Les I.} and Bunting, {A. S.} and Stevenson, {J. T.M.} and Stewart Smith and MacKay, {C. Logan} and Langridge-Smith, {Pat R.R.} and Stokes, {Adam A.} and Walton, {Anthony J.}",

year = "2012",

month = aug,

day = "13",

doi = "10.1109/TSM.2012.2202770",

language = "English",

volume = "25",

pages = "323--330",

journal = "IEEE Transactions on Semiconductor Manufacturing",

issn = "0894-6507",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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Li, Y, Fu, RY, Winters, D, Flynn, BW, Parkes, B, Brodie, DS, Liu, Y, Terry, J, Haworth, LI, Bunting, AS, Stevenson, JTM, Smith, S, MacKay, CL, Langridge-Smith, PRR, Stokes, AA & Walton, AJ 2012, 'Test structures for characterizing the integration of EWOD and SAW technologies for microfluidics', IEEE Transactions on Semiconductor Manufacturing, vol. 25, no. 3, 6212373, pp. 323-330. https://doi.org/10.1109/TSM.2012.2202770

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AU - Li, Yifan

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AU - Flynn, Brian W.

AU - Parkes, Bill

AU - Brodie, Douglas Stuart

AU - Liu, Yufei

AU - Terry, Jonathan

AU - Haworth, Les I.

AU - Bunting, A. S.

AU - Stevenson, J. T.M.

AU - Smith, Stewart

AU - MacKay, C. Logan

AU - Langridge-Smith, Pat R.R.

AU - Stokes, Adam A.

AU - Walton, Anthony J.

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AB - This paper presents details of the design and fabrication of test structures specifically designed for the characterization of two distinct digital microfluidic technologies: electro-wetting on dielectric (EWOD) and surface acoustic wave (SAW). A test chip has been fabricated that includes structures with a wide range of dimensions and provides the capability to characterize enhanced droplet manipulation, as well as other integrated functions. The EWOD and SAW devices have been separately characterized first of all to determine whether integration of the technologies affects their individual performance, including device lifetime evaluation. Microfluidic functions have then been demonstrated, including combined EWOD/SAW functions. In particular, this paper details the use of EWOD to anchor droplets, while SAW excitation is applied to perform mixing. The relationship between test structure designs and the droplets anchoring performance has been studied.

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KW - integration

KW - surface acoustic wave (SAW)

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Test structures for characterizing the integration of EWOD and SAW technologies for microfluidics

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Keywords

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