Test structures and a measurement system for characterising the lifetime of EWOD devices

D. Gruber*, Y. Li, S. Smith, A. Tiwari, F. Deng, A. A. Stokes, J. G. Terry, A. S. Bunting, L. Mackay, P. Langridge-Smith, A. J. Walton

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper presents a methodology together with a characterisation system for rapidly and quantitatively evaluating the lifetime and reliability of Electro-Wetting-on-Dielectric (EWOD) microfluidic devices. By studying the contact angle (CA) change when electrowetting forces are applied on the test structure, the number of times of a droplet can be switched between relaxed and actuated states can be characterised. This paper describes the development of an automated measurement system together with test structures designed to quickly characterise and optimise EWOD dielectric layer compositions. This enables the rapid determination of the driving voltage that results in the longest lifetime of the device, providing the tools to optimise both the process, architecture and the voltage driving scheme.

Original languageEnglish
Title of host publication2011 IEEE International Conference on Microelectronic Test Structures - 24th ICMTS Conference Proceedings
Pages80-84
Number of pages5
DOIs
Publication statusPublished - 9 Sept 2011
Event2011 24th IEEE International Conference on Microelectronic Test Structures, ICMTS 2011 - Amsterdam, Netherlands
Duration: 4 Apr 20117 Apr 2011

Conference

Conference2011 24th IEEE International Conference on Microelectronic Test Structures, ICMTS 2011
Country/TerritoryNetherlands
CityAmsterdam
Period4/04/117/04/11

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