Test structures and a measurement system for characterising the lifetime of EWOD devices

D. Gruber; Y. Li; S. Smith; A. Tiwari; F. Deng; A. A. Stokes; J. G. Terry; A. S. Bunting; L. Mackay; P. Langridge-Smith; A. J. Walton

doi:10.1109/ICMTS.2011.5976864

Test structures and a measurement system for characterising the lifetime of EWOD devices

D. Gruber^*, Y. Li, S. Smith, A. Tiwari, F. Deng, A. A. Stokes, J. G. Terry, A. S. Bunting, L. Mackay, P. Langridge-Smith, A. J. Walton

^*Corresponding author for this work

School of Physics and Astronomy

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents a methodology together with a characterisation system for rapidly and quantitatively evaluating the lifetime and reliability of Electro-Wetting-on-Dielectric (EWOD) microfluidic devices. By studying the contact angle (CA) change when electrowetting forces are applied on the test structure, the number of times of a droplet can be switched between relaxed and actuated states can be characterised. This paper describes the development of an automated measurement system together with test structures designed to quickly characterise and optimise EWOD dielectric layer compositions. This enables the rapid determination of the driving voltage that results in the longest lifetime of the device, providing the tools to optimise both the process, architecture and the voltage driving scheme.

Original language	English
Title of host publication	2011 IEEE International Conference on Microelectronic Test Structures - 24th ICMTS Conference Proceedings
Pages	80-84
Number of pages	5
DOIs	https://doi.org/10.1109/ICMTS.2011.5976864
Publication status	Published - 9 Sept 2011
Event	2011 24th IEEE International Conference on Microelectronic Test Structures, ICMTS 2011 - Amsterdam, Netherlands Duration: 4 Apr 2011 → 7 Apr 2011

Conference

Conference	2011 24th IEEE International Conference on Microelectronic Test Structures, ICMTS 2011
Country/Territory	Netherlands
City	Amsterdam
Period	4/04/11 → 7/04/11

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Gruber, D., Li, Y., Smith, S., Tiwari, A., Deng, F., Stokes, A. A., Terry, J. G., Bunting, A. S., Mackay, L., Langridge-Smith, P., & Walton, A. J. (2011). Test structures and a measurement system for characterising the lifetime of EWOD devices. In 2011 IEEE International Conference on Microelectronic Test Structures - 24th ICMTS Conference Proceedings (pp. 80-84). Article 5976864 https://doi.org/10.1109/ICMTS.2011.5976864

@inproceedings{3300f024195a47dca7ac3ea803d84581,

title = "Test structures and a measurement system for characterising the lifetime of EWOD devices",

abstract = "This paper presents a methodology together with a characterisation system for rapidly and quantitatively evaluating the lifetime and reliability of Electro-Wetting-on-Dielectric (EWOD) microfluidic devices. By studying the contact angle (CA) change when electrowetting forces are applied on the test structure, the number of times of a droplet can be switched between relaxed and actuated states can be characterised. This paper describes the development of an automated measurement system together with test structures designed to quickly characterise and optimise EWOD dielectric layer compositions. This enables the rapid determination of the driving voltage that results in the longest lifetime of the device, providing the tools to optimise both the process, architecture and the voltage driving scheme.",

author = "D. Gruber and Y. Li and S. Smith and A. Tiwari and F. Deng and Stokes, {A. A.} and Terry, {J. G.} and Bunting, {A. S.} and L. Mackay and P. Langridge-Smith and Walton, {A. J.}",

year = "2011",

month = sep,

day = "9",

doi = "10.1109/ICMTS.2011.5976864",

language = "English",

isbn = "9781424485277",

pages = "80--84",

booktitle = "2011 IEEE International Conference on Microelectronic Test Structures - 24th ICMTS Conference Proceedings",

note = "2011 24th IEEE International Conference on Microelectronic Test Structures, ICMTS 2011 ; Conference date: 04-04-2011 Through 07-04-2011",

}

Gruber, D, Li, Y, Smith, S, Tiwari, A, Deng, F, Stokes, AA, Terry, JG, Bunting, AS, Mackay, L, Langridge-Smith, P & Walton, AJ 2011, Test structures and a measurement system for characterising the lifetime of EWOD devices. in 2011 IEEE International Conference on Microelectronic Test Structures - 24th ICMTS Conference Proceedings., 5976864, pp. 80-84, 2011 24th IEEE International Conference on Microelectronic Test Structures, ICMTS 2011, Amsterdam, Netherlands, 4/04/11. https://doi.org/10.1109/ICMTS.2011.5976864

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T1 - Test structures and a measurement system for characterising the lifetime of EWOD devices

AU - Gruber, D.

AU - Li, Y.

AU - Smith, S.

AU - Tiwari, A.

AU - Deng, F.

AU - Stokes, A. A.

AU - Terry, J. G.

AU - Bunting, A. S.

AU - Mackay, L.

AU - Langridge-Smith, P.

AU - Walton, A. J.

PY - 2011/9/9

Y1 - 2011/9/9

N2 - This paper presents a methodology together with a characterisation system for rapidly and quantitatively evaluating the lifetime and reliability of Electro-Wetting-on-Dielectric (EWOD) microfluidic devices. By studying the contact angle (CA) change when electrowetting forces are applied on the test structure, the number of times of a droplet can be switched between relaxed and actuated states can be characterised. This paper describes the development of an automated measurement system together with test structures designed to quickly characterise and optimise EWOD dielectric layer compositions. This enables the rapid determination of the driving voltage that results in the longest lifetime of the device, providing the tools to optimise both the process, architecture and the voltage driving scheme.

AB - This paper presents a methodology together with a characterisation system for rapidly and quantitatively evaluating the lifetime and reliability of Electro-Wetting-on-Dielectric (EWOD) microfluidic devices. By studying the contact angle (CA) change when electrowetting forces are applied on the test structure, the number of times of a droplet can be switched between relaxed and actuated states can be characterised. This paper describes the development of an automated measurement system together with test structures designed to quickly characterise and optimise EWOD dielectric layer compositions. This enables the rapid determination of the driving voltage that results in the longest lifetime of the device, providing the tools to optimise both the process, architecture and the voltage driving scheme.

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U2 - 10.1109/ICMTS.2011.5976864

DO - 10.1109/ICMTS.2011.5976864

M3 - Conference contribution

AN - SCOPUS:80052418736

SN - 9781424485277

SP - 80

EP - 84

BT - 2011 IEEE International Conference on Microelectronic Test Structures - 24th ICMTS Conference Proceedings

T2 - 2011 24th IEEE International Conference on Microelectronic Test Structures, ICMTS 2011

Y2 - 4 April 2011 through 7 April 2011

ER -

Test structures and a measurement system for characterising the lifetime of EWOD devices

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