Temperature dependence of stoichiometry of laser ablated YBa2Cu3O7−x thin films

K  SCOTT; A  MACKENZIE; C  DINEEN; W A  PHILLIPS

doi:10.1016/0921-4534(91)91116-L

Temperature dependence of stoichiometry of laser ablated YBa2Cu3O7−x thin films

K SCOTT, A MACKENZIE, C DINEEN, W A PHILLIPS

Research output: Contribution to journal › Article › peer-review

Abstract

Most of the analytical technique used in thin film research are insensitive to oxygen, and many are prone to thickness-dependent systematic errors. Electron Probe Microanalysis (EPMA) can give accurate analyses of thin films if sufficiently low accelerating voltages are used. We have used the technique to study whether fine stoichiometric changes are responsible for the quality differences that are observed in YBa2Cu3O7-x thin films produced at different substrate temperatures.

Original language	English
Pages (from-to)	1983-1984
Number of pages	2
Journal	Physica C: Superconductivity
Volume	185-189
Issue number	3
DOIs	https://doi.org/10.1016/0921-4534(91)91116-L
Publication status	Published - 1 Dec 1991

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10.1016/0921-4534(91)91116-L

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title = "Temperature dependence of stoichiometry of laser ablated YBa2Cu3O7−x thin films",

abstract = "Most of the analytical technique used in thin film research are insensitive to oxygen, and many are prone to thickness-dependent systematic errors. Electron Probe Microanalysis (EPMA) can give accurate analyses of thin films if sufficiently low accelerating voltages are used. We have used the technique to study whether fine stoichiometric changes are responsible for the quality differences that are observed in YBa2Cu3O7-x thin films produced at different substrate temperatures.",

author = "K SCOTT and A MACKENZIE and C DINEEN and PHILLIPS, {W A}",

year = "1991",

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AU - SCOTT, K

AU - MACKENZIE, A

AU - DINEEN, C

AU - PHILLIPS, W A

PY - 1991/12/1

Y1 - 1991/12/1

N2 - Most of the analytical technique used in thin film research are insensitive to oxygen, and many are prone to thickness-dependent systematic errors. Electron Probe Microanalysis (EPMA) can give accurate analyses of thin films if sufficiently low accelerating voltages are used. We have used the technique to study whether fine stoichiometric changes are responsible for the quality differences that are observed in YBa2Cu3O7-x thin films produced at different substrate temperatures.

AB - Most of the analytical technique used in thin film research are insensitive to oxygen, and many are prone to thickness-dependent systematic errors. Electron Probe Microanalysis (EPMA) can give accurate analyses of thin films if sufficiently low accelerating voltages are used. We have used the technique to study whether fine stoichiometric changes are responsible for the quality differences that are observed in YBa2Cu3O7-x thin films produced at different substrate temperatures.

U2 - 10.1016/0921-4534(91)91116-L

DO - 10.1016/0921-4534(91)91116-L

M3 - Article

SN - 0921-4534

VL - 185-189

SP - 1983

EP - 1984

JO - Physica C: Superconductivity

JF - Physica C: Superconductivity

IS - 3

ER -

Temperature dependence of stoichiometry of laser ablated YBa2Cu3O7−x thin films

Abstract

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