Submicron three-dimensional trenched electrodes and capacitors for DRAMs and FRAMs: Fabrication and electrical testing

M. Miyake, J. F. Scott, X. J. Lou, F. D. Morrison, T. Nonaka, S. Motoyama, T. Tatsuta, O. Tsuji

Research output: Contribution to journal › Article › peer-review

1 results

Finished
Royal Society Fellowship 516002.K5799/je: Royal Society Fellowship 516002.K5799/je
Morrison, F. (PI)
The Royal Society
1/08/06 → 30/09/09
Project: Fellowship