Abstract
A solid state electrochemical cell, Na0.75CoO2/sodium beta-alumina/metal grid, is presented which is capable of producing a beam of sodium vapour in UHV. Cells such as these have potential applications as a source of dopants in semiconductor fabrication. Electrochemical measurements and a new spectroelectrochemical technique provide mechanistic information regarding sodium electro-generation.
Original language | English |
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Pages (from-to) | 1371-1378 |
Number of pages | 8 |
Journal | Solid State Ionics |
Volume | 86-8 |
Publication status | Published - Jul 1996 |
Keywords
- electrochemical cell
- solid-state cell
- vapour beam doping
- spectroelectrochemical analysis
- overpotential