Shot shifting for nanophotonic applications

Giuseppe Pagnotta, Liam O'Faolain, David O'Brien, Thomas F. Krauss

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

In this paper, we apply the technique of shot shifting to photonic wires and photonic crystals. We show that is may significantly reduce the discontinuities introduced by stitching dramatically improving the device quality. (c) 2007 Elsevier B.V. All rights reserved.

Original languageEnglish
Pages (from-to)1463-1466
Number of pages4
JournalMicroelectronic Engineering
Volume84
DOIs
Publication statusPublished - May 2007

Keywords

  • nanophotonics
  • electron beam lithography
  • shot shift
  • stitching error
  • photonic crystal
  • photonic wire
  • CRYSTAL WAVE-GUIDES
  • PHOTONIC CRYSTAL

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