Quantifying the impact of proximity error correction on plasmonic metasurfaces [Invited]

Sebastian A. Schulz, Jeremy Upham, Frédéric Bouchard, Israel De Leon, Ebrahim Karimi, Robert W. Boyd

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

Plasmonic metasurfaces are often limited in their application by poor device performance, which is caused - in part - by deviations between fabricated devices and the ideal design. We show in this letter that these deviations are reduced significantly by shape-correction, intra-structure proximity error correction. We show experimentally that the fabrication fidelity alone is not a good indicator of the device quality and that direct measurements of the optical performance are necessary. Our fabrication improvements result in increased optical performance, reaching a measurement fidelity as high as 90%.
Original languageEnglish
Pages (from-to)2798-2803
JournalOptical Materials Express
Volume5
Issue number12
DOIs
Publication statusPublished - 10 Nov 2015

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