PRECISE MEASUREMENTS OF OXYGEN-CONTENT - OXYGEN VACANCIES IN TRANSPARENT CONDUCTING INDIUM OXIDE-FILMS

J R BELLINGHAM, A P MACKENZIE, W A PHILLIPS

Research output: Contribution to journalArticlepeer-review

110 Citations (Scopus)

Abstract

High precision electron probe microanalysis (EPMA) has been used to measure the correlation of oxygen deficiency with carrier concentration in thin films of amorphous indium oxide. This has shown that there are ten times as many oxygen vacancies as would be expected from the carrier concentration measurements, giving a doping efficiency of 0.1. It is therefore clear that the doping mechanism is more complex than the usual picture of every oxygen vacancy producing two free electrons.

Original languageEnglish
Pages (from-to)2506-2508
Number of pages3
JournalApplied Physics Letters
Volume58
Issue number22
Publication statusPublished - 3 Jun 1991

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