Patterning multicolor hybrid perovskite films via top-down lithography

Jonathon Harwell, James Burch, Alasdair Fikouras, Malte C. Gather, Andrea Di Falco, Ifor D. W. Samuel

Research output: Contribution to journalArticlepeer-review

101 Citations (Scopus)
2 Downloads (Pure)


Lead-halide perovskites have attracted great attention due to their excellent optoelectronic properties, with rapid progress being made in their performance as light-emitting diodes (LEDs), photodiodes, and solar cells. Demonstrating large scale, high-resolution patterning of perovskites is a key enabling step to unlock their full potential for a range of optoelectronic applications. However, the development of a successful top-down lithography fabrication procedure has so far been hampered by the incompatibility of perovskite films with the solvents used during lithographic processes. Here, we perform a study on the effect of different lithographic solvents on perovskite films and use this insight to develop photolithography and electron-beam lithography procedures for patterning perovskite films. This procedure uses standard resists at low temperatures and achieves micron-scale features with flat tops. Furthermore, we expand this platform to produce arrays of multicolor pixels for potential commercial perovskite LED display applications.
Original languageEnglish
Pages (from-to)3823–3829
JournalACS Nano
Issue number4
Early online date22 Feb 2019
Publication statusPublished - 23 Apr 2019


  • Perovskite
  • Light-emitting diode
  • Lithography
  • Patterning
  • Photoluminescence
  • Solution-processed
  • Multicolor


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