On-chip nano-localization via transverse kerker scattering

A. Bag, M. Neugebauer, U. Mick, S. Christiansen, S.A. Schulz, P. Banzer*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Here we present a transverse Kerker scattering based sub-wavelength localization technique transferred to a chip-scale all-optical displacement sensing device, which could act as a metrological instrument in modern lithography and microscopy, or monitor system drifts.
Original languageEnglish
Title of host publicationFrontiers in Optics/Laser Science 2020
PublisherOptical Society of American (OSA)
ISBN (Print)9781557528209
DOIs
Publication statusPublished - 14 Sept 2020
Event2020 Frontiers in Optics Conference (FiO 2020) -
Duration: 14 Sept 202017 Sept 2020

Publication series

NameOSA Technical Digest

Conference

Conference2020 Frontiers in Optics Conference (FiO 2020)
Abbreviated titleFiO 2020
Period14/09/2017/09/20

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