Nanoscale electrode arrays produced with microscale lithographic techniques for use in biomedical sensing applications

Jonathan G. Terry*, Ilka Schmüser, Ian Underwood, Damion K. Corrigan, Neville J. Freeman, Andrew S. Bunting, Andrew R. Mount, Anthony J. Walton

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)


A novel technique for the production of nanoscale electrode arrays that uses standard microfabrication processes and micron-scale photolithography is reported here in detail. These microsquare nanoband edge electrode (MNEE) arrays have been fabricated with highly reproducible control of the key array dimensions, including the size and pitch of the individual elements and, most importantly, the width of the nanoband electrodes. The definition of lateral features to nanoscale dimensions typically requires expensive patterning techniques that are complex and low-throughput. However, the fabrication methodology used here relies on the fact that vertical dimensions (i.e. layer thicknesses) have long been manufacturable at the nanoscale using thin film deposition techniques that are well established in mainstream microelectronics. The authors report for the first time two aspects that highlight the particular suitability of these MNEE array systems for probe monolayer biosensing. The first is simulation, which shows the enhanced sensitivity to the redox reaction of the solution redox couple. The second is the enhancement of probe film functionalisation observed for the probe film model molecule, 6-mercapto-1-hexanol compared with microsquare electrodes. Such surface modification for specific probe layer biosensing and detection is of significance for a wide range of biomedical and other sensing and analytical applications.

Original languageEnglish
Pages (from-to)125-134
Number of pages10
JournalIET Nanobiotechnology
Issue number4
Publication statusPublished - 29 Nov 2013


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