@inproceedings{e158fef8abd24e36bec234a43d74c753,
title = "Nanometre control and determination of hole size in photonic crystal slabs",
abstract = "All photonic crystal slab designs rely on the accurate control of the sizes of the holes during fabrication - a small error of just a few nanometers can mean a shift of tens of nanometers in the operating wavelength of the device. A key problem is the measurement of the hole size. We have developed an optical method which determines the functional hole diameter with a typical accuracy of 5 nm. We also suggest a way for the nanometre control of the hole diameter.",
author = "Beggs, {Daryl M.} and Liam O'Faolain and Krauss, {Thomas F.}",
year = "2010",
month = may,
doi = "10.1117/12.854969",
language = "English",
isbn = "978-0-8194-8186-3",
volume = "7713",
series = "Proceedings of SPIE-The International Society for Optical Engineering",
publisher = "SPIE",
pages = "77131Y",
editor = "HR Miguez and SG Romanov and LC Andreani and C Seassal",
booktitle = "Photonic Crystal Materials and Devices IX",
address = "United States",
note = "Conference on Photonic Crystal Materials and Devices IX ; Conference date: 12-04-2010 Through 15-04-2010",
}