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Nanocrystalline SiC sputtered on porous silicon substrate after annealing

N. Naderi, M. R. Hashim

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)90-92
Number of pages3
JournalMaterials Letters
Volume97
DOIs
Publication statusPublished - 15 Apr 2013

Keywords

  • Nanocrystalline materials
  • Optical materials and properties
  • Raman
  • Silicon carbide
  • Sputtering
  • Thermal annealing

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