Abstract
We present an automated surface profiling system based on a shearing interferometer, in which precise measurement of the polarization states eliminates fringe ambiguity. A full error correction based on Mueller matrices allows comparatively inaccurate but rapidly switchable liquid-crystal wave plates to be used, enabling unambiguous profile information to be obtained in real time. (C) 2001 Optical Society of America.
| Original language | English |
|---|---|
| Pages (from-to) | 3205-3210 |
| Number of pages | 6 |
| Journal | Applied Optics |
| Volume | 40 |
| Publication status | Published - 1 Jul 2001 |
Keywords
- SURFACE
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