Abstract
We present an automated surface profiling system based on a shearing interferometer, in which precise measurement of the polarization states eliminates fringe ambiguity. A full error correction based on Mueller matrices allows comparatively inaccurate but rapidly switchable liquid-crystal wave plates to be used, enabling unambiguous profile information to be obtained in real time. (C) 2001 Optical Society of America.
Original language | English |
---|---|
Pages (from-to) | 3205-3210 |
Number of pages | 6 |
Journal | Applied Optics |
Volume | 40 |
Publication status | Published - 1 Jul 2001 |
Keywords
- SURFACE