Misted deposition of [3D] trenches for drams and frams - III. PZT thin films and PZT nanotubes

M. Miyake, J. F. Scott, X. -J. Lou, F. D. Morrison, S. Motoyama, T. Tatsuta, O. Tsuji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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