Microelectromechanical systems for biomimetical applications

Rhonira Latif; Enrico Mastropaolo; Andy Bunting; Rebecca Cheung; Thomas Koickal; Alister Hamilton; Michael Newton; Leslie Smith

doi:10.1116/1.3504892

Microelectromechanical systems for biomimetical applications

Rhonira Latif^*, Enrico Mastropaolo, Andy Bunting, Rebecca Cheung, Thomas Koickal, Alister Hamilton, Michael Newton, Leslie Smith

^*Corresponding author for this work

School of Physics and Astronomy

Research output: Contribution to journal › Article › peer-review

Abstract

An etch release process capable of releasing long resonant gate transistor bridges from a sacrificial layer has been studied as a step towards developing a system to mimic the cochlear mechanism inside the human ear. The developed etch release process involves the use of a gentle etch tool that is capable of a clean and damage-free etch release. The influence of temperature and oxygen/nitrogen gas flow rates on the undercut etch rates and the profiles of photoresist and polyimide sacrificial layers have been investigated. An array of aluminum bridges of length 0.278-1.618 mm, which cover the frequencies from 1 to 33.86 kHz, has been designed and released from a sacrificial layer. The resonating beams have been measured.

Original language	English
Journal	Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume	28
Issue number	6
DOIs	https://doi.org/10.1116/1.3504892
Publication status	Published - 1 Jan 2010

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10.1116/1.3504892

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AU - Latif, Rhonira

AU - Mastropaolo, Enrico

AU - Bunting, Andy

AU - Cheung, Rebecca

AU - Koickal, Thomas

AU - Hamilton, Alister

AU - Newton, Michael

AU - Smith, Leslie

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Microelectromechanical systems for biomimetical applications

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