Abstract
The fabrication and characterisation of high-quality silicon membrane photonic crystals are reported. The etching process was carefully optimised to give holes with very smooth and vertical sidewalls, resulting in propagation, with a minimum loss of 4.1 +/- 0.9 dB/cm in a single line defect (W1) waveguide.
Original language | English |
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Pages (from-to) | 1454-1455 |
Number of pages | 2 |
Journal | Electronics Letters |
Volume | 42 |
DOIs | |
Publication status | Published - 7 Dec 2006 |