Abstract
We have fabricated high-quality planar photonic crystal defect waveguides in InP/InGaAsP material. Using Fourier analysis of the Fabry-Perot fringes obtained in transmission, we derive the propagation losses. Values as small as 1.8 dB/mm for waveguides consisting of three rows of missing holes (W3) were measured. We believe that the reduction in losses is due to the high quality of etching carried out using a high beam voltage-current ratio regime of chemically assisted ion-beam etching. (C) 2004 American Institute of Physics.
| Original language | English |
|---|---|
| Pages (from-to) | 3588-3590 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 84 |
| Issue number | 18 |
| DOIs | |
| Publication status | Published - 3 May 2004 |
Keywords
- RADIATION LOSSES
- PROPAGATION LOSSES
- HOLE DEPTH
- BOUNDARIES
- SHAPE