Low frequency graphene resonators for acoustic sensing

Eldad Grady*, Enrico Mastropaolo, Tao Chen, Andrew Bunting, Rebecca Cheung

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

Graphene resonators have been fabricated in rectangular and circular geometries ranging from 1 to 3 mm in diameter. The resonant frequencies have been measured, and fitted to an analytical model. An optical profile of the graphene sheet has been taken, and the monolayer graphene has been confirmed to be of high quality using Raman spectroscopy. The graphene membranes have shown hookean behaviour with no evidence of deformation. The characterisation of the single layer graphene sheet on this large scale provides new information previously unavailable on the mechanical stability of graphene with ultra high aspect ratio.

Original languageEnglish
Pages (from-to)105-108
Number of pages4
JournalMicroelectronic Engineering
Volume119
DOIs
Publication statusPublished - 1 May 2014

Keywords

  • Acoustic sensing
  • Graphene
  • MEMS
  • Raman
  • Resonant frequency
  • Young's modulus

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