@inproceedings{0fce932cc5194fe7b2547c88846be6eb,
title = "Laser assisted microstructuring of amorphous silicon for microelectronics",
abstract = "We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.",
author = "Halim, {M. M.} and A. Abdolvand and Y. Fan and Persheyev, {S. K.} and C. Main and Rafailov, {E. U.} and Rose, {M. J.}",
year = "2010",
language = "English",
isbn = "9781557528902",
series = "Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010",
booktitle = "Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference",
note = "Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010 ; Conference date: 16-05-2010 Through 21-05-2010",
}