Laser assisted microstructuring of amorphous silicon for microelectronics

M. M. Halim, A. Abdolvand, Y. Fan, S. K. Persheyev, C. Main, E. U. Rafailov, M. J. Rose

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.

Original languageEnglish
Title of host publicationLasers and Electro-Optics/Quantum Electronics and Laser Science Conference
Subtitle of host publication2010 Laser Science to Photonic Applications, CLEO/QELS 2010
Publication statusPublished - 2010
EventLasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010 - San Jose, CA, United States
Duration: 16 May 201021 May 2010

Publication series

NameLasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010

Conference

ConferenceLasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010
Country/TerritoryUnited States
CitySan Jose, CA
Period16/05/1021/05/10

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