@inproceedings{3309921d9e924fd78974e22831b8d9fb,
title = "Laser assisted microstructuring of amorphous silicon for microelectronics",
abstract = "We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.",
author = "Halim, {M. M.} and A. Abdolvand and Y. Fan and Persheyev, {S. K.} and C. Main and Rafailov, {E. U.} and Rose, {M. J.}",
year = "2010",
doi = "10.1364/CLEO.2010.JTuD17",
language = "English",
isbn = "9781557528896",
series = "Optics InfoBase Conference Papers",
booktitle = "Conference on Lasers and Electro-Optics, CLEO 2010",
note = "Conference on Lasers and Electro-Optics, CLEO 2010 ; Conference date: 16-05-2010 Through 21-05-2010",
}