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Integration of IC technology with MEMS: Silicon + technology for the future
A. J. Walton, J. T.M. Stevenson, I. Underwood, J. G. Terry, S. Smith, W. Parkes, C. Dunare, H. Lin, Y. Li, R. Henderson, D. Renshaw, K. Muir, M. Desmulliez, D. Flynn, M. J. MacIntosh, W. S. Holland, A. F. Murray, T. B. Tang, A. Bunting, A. M. Gundlach
Research output: Contribution to conference › Paper › peer-review