Hybrid plasmas for materials processing

Reinosuke Kusano, Yukihiro Kusano*

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review

3 Citations (Scopus)
2 Downloads (Pure)

Abstract

Hybrid plasmas have been reported in various areas of research over the last 40 years. However, a general overview of hybrid plasmas has never been presented or reported. In the present work, a survey of the literature and patents is carried out to provide the reader with a broad view of hybrid plasmas. The term refers to several different configurations of plasmas, including but not limited to: plasmas driven by several power sources simultaneously or sequentially, plasmas that have the properties of both thermal and nonthermal plasmas, plasmas that are enhanced by additional energy, and plasmas that are operated in a unique medium. In addition, a way of evaluating hybrid plasmas in terms of the improvement of processes is discussed, as well as the negative impacts that follow the employment of hybrid plasmas. Regardless of what the hybrid plasma in question is composed of, it often poses a unique advantage to its nonhybrid counterpart, whether it be used for welding, surface treatment, materials synthesis, coating deposition, gas phase reactions, or medicine.
Original languageEnglish
Article number4013
Number of pages25
JournalMaterials
Volume16
Issue number11
DOIs
Publication statusPublished - 27 May 2023

Keywords

  • Gas discharge plasma
  • Hybrid plasma
  • Inductively coupled plasma
  • Capacitively coupled plasma
  • Microwave plasma
  • Arc
  • Gliding arc

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