High-temperature phase transitions in SrHfO3: A Raman scattering study

Manoj K. Singh; Gulab Singh; Tae Hyun Kim; Seiji Kojima; Ram S. Katiyar; J. F. Scott

doi:10.1209/0295-5075/107/26004

High-temperature phase transitions in SrHfO3: A Raman scattering study

Manoj K. Singh^*, Gulab Singh, Tae Hyun Kim, Seiji Kojima, Ram S. Katiyar, J. F. Scott

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

SrHfO3 (SHO) is probably the leading gate oxide for the Si chip industry. The material is processed at similar to 400K and annealed at high temperature similar to 1600 K. Unfortunately there are two phase transitions in SrHfO3 in this temperature range, which can affect the quality of the final films processed, especially their channel mobility in SHO-based n-FET. To clarify these transitions and their impact on SrHfO3 processing, we report the temperature dependence of soft phonon modes by Raman spectroscopy. The 1023K Cmcm-I4mcm transition is found to be displacive (no disorder) and nearly second order. Significant effects are also seen in the orthorhombic-orthorhombic Pnma-Cmcm transition at 670 K. Copyright (C) EPLA, 2014

Original language	English
Article number	26004
Number of pages	6
Journal	EPL
Volume	107
Issue number	2
DOIs	https://doi.org/10.1209/0295-5075/107/26004
Publication status	Published - Jul 2014

Keywords

SOFT PHONON MODES
PEROVSKITE
PHOTOLUMINESCENCE
(SRTIO3)-O-18
SPECTRA
SRZRO3
SRTIO3

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@article{9f6606ea7a534335aa8a8da7c2ffb441,

title = "High-temperature phase transitions in SrHfO3: A Raman scattering study",

abstract = "SrHfO3 (SHO) is probably the leading gate oxide for the Si chip industry. The material is processed at similar to 400K and annealed at high temperature similar to 1600 K. Unfortunately there are two phase transitions in SrHfO3 in this temperature range, which can affect the quality of the final films processed, especially their channel mobility in SHO-based n-FET. To clarify these transitions and their impact on SrHfO3 processing, we report the temperature dependence of soft phonon modes by Raman spectroscopy. The 1023K Cmcm-I4mcm transition is found to be displacive (no disorder) and nearly second order. Significant effects are also seen in the orthorhombic-orthorhombic Pnma-Cmcm transition at 670 K. Copyright (C) EPLA, 2014",

keywords = "SOFT PHONON MODES, PEROVSKITE, PHOTOLUMINESCENCE, (SRTIO3)-O-18, SPECTRA, SRZRO3, SRTIO3",

author = "Singh, {Manoj K.} and Gulab Singh and Kim, {Tae Hyun} and Seiji Kojima and Katiyar, {Ram S.} and Scott, {J. F.}",

year = "2014",

month = jul,

doi = "10.1209/0295-5075/107/26004",

language = "English",

volume = "107",

journal = "EPL",

issn = "0295-5075",

publisher = "EDP SCIENCES S A",

number = "2",

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TY - JOUR

T1 - High-temperature phase transitions in SrHfO3: A Raman scattering study

AU - Singh, Manoj K.

AU - Singh, Gulab

AU - Kim, Tae Hyun

AU - Kojima, Seiji

AU - Katiyar, Ram S.

AU - Scott, J. F.

PY - 2014/7

Y1 - 2014/7

N2 - SrHfO3 (SHO) is probably the leading gate oxide for the Si chip industry. The material is processed at similar to 400K and annealed at high temperature similar to 1600 K. Unfortunately there are two phase transitions in SrHfO3 in this temperature range, which can affect the quality of the final films processed, especially their channel mobility in SHO-based n-FET. To clarify these transitions and their impact on SrHfO3 processing, we report the temperature dependence of soft phonon modes by Raman spectroscopy. The 1023K Cmcm-I4mcm transition is found to be displacive (no disorder) and nearly second order. Significant effects are also seen in the orthorhombic-orthorhombic Pnma-Cmcm transition at 670 K. Copyright (C) EPLA, 2014

AB - SrHfO3 (SHO) is probably the leading gate oxide for the Si chip industry. The material is processed at similar to 400K and annealed at high temperature similar to 1600 K. Unfortunately there are two phase transitions in SrHfO3 in this temperature range, which can affect the quality of the final films processed, especially their channel mobility in SHO-based n-FET. To clarify these transitions and their impact on SrHfO3 processing, we report the temperature dependence of soft phonon modes by Raman spectroscopy. The 1023K Cmcm-I4mcm transition is found to be displacive (no disorder) and nearly second order. Significant effects are also seen in the orthorhombic-orthorhombic Pnma-Cmcm transition at 670 K. Copyright (C) EPLA, 2014

KW - SOFT PHONON MODES

KW - PEROVSKITE

KW - PHOTOLUMINESCENCE

KW - (SRTIO3)-O-18

KW - SPECTRA

KW - SRZRO3

KW - SRTIO3

U2 - 10.1209/0295-5075/107/26004

DO - 10.1209/0295-5075/107/26004

M3 - Article

SN - 0295-5075

VL - 107

JO - EPL

JF - EPL

IS - 2

M1 - 26004

ER -

High-temperature phase transitions in SrHfO3: A Raman scattering study

Abstract

Keywords

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