Abstract
We investigate etching conditions for photonic crystals (PhCs) in InGaAsP/InP and AlGaAs/GaAs using a new regime of CAME operation. We show that the beam voltage-current ratio is critical in obtaining high material/mask selectivity. For one-dimensional PhCs, i.e., air slots, selectivities of 22:1 and 50:1 were achieved in InP and GaAs, respectively, using a very high beam voltage (about 1500 V) and a low beam current (about 10 mA). Etched features were observed to be very smooth, i.e., edge roughness was low. Two-dimensional PhCs were etched in InGaAsP/InP under similar conditions achieving selectivities up to 27:1 and 34:1 for hole diameters of 170 and 270 nm, respectively. (C) 2004 American Vacuum Society.
| Original language | English |
|---|---|
| Pages (from-to) | 1788-1791 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology B |
| Volume | 22 |
| DOIs | |
| Publication status | Published - Jul 2004 |
Keywords
- WAVE-GUIDES
- INP
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