Gap states at the interface of ultra-thin oxide and organic films on Si(100)

T Bitzer, T Rada, N V Richardson, T Dittrich, F Koch

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The formation of gap states during the initial oxidation of Si(100)-2x1 and the adsorption of maleic anhydride on Si(100)-2x1 at room temperature have been followed with photoluminescence measurements and high resolution electron energy loss spectroscopy. We observe that gal? states are already induced after the adsorption of 0.002 L of molecular oxygen on Si(100)-2x1. Prolonged exposures to molecular oxygen results in a marked increase of the gap state density. In contrast, repeated cycles of water adsorption and heating to 530 degrees C leads to a thicker oxide film, which exhibits a reduced gap state density. The adsorption of the unsaturated organic molecule maleic anhydride on Si(100)-2x1 does not induce the formation of gap states.

Original languageEnglish
Title of host publicationUltra clean processing of silicon surfaces V
EditorsM. Heyns, M. Meuris, P. Mertens
PublisherScitec Publications
Pages131-134
Number of pages4
ISBN (Print)3-908450-57-8
DOIs
Publication statusPublished - 2001
Event5th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000) - Oostende, Belgium
Duration: 18 Sept 200020 Sept 2000

Publication series

NameSolid State Phenomena
Volume76-77
ISSN (Print)1012-0394

Conference

Conference5th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000)
Country/TerritoryBelgium
CityOostende
Period18/09/0020/09/00

Keywords

  • gap states
  • organic film/silicon interface
  • ultra-thin oxide
  • OXIDATION
  • SI(111)

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