Fabrication of prototype imaging arrays for SCUBA-2

G. C. Hilton*, J. A. Beall, W. B. Doriese, W. D. Duncan, L. S. Ferreira, K. D. Irwin, C. D. Reintsema, J. N. Ullom, L. R. Vale, Y. Xu, B. L. Zink, W. Parkes, A. S. Bunting, C. C. Dunare, A. M. Gundlach, J. T.M. Stevenson, A. J. Walton, E. Schulte, E. Corrales, J. P. SienickiDan Bintley, P. A.R. Ade, Rashmi V. Sudiwala, Adam L. Woodcraft, Mark Halpern, W. Holland, M. D. Audley, M. MacIntosh

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


Prototype imaging subarrays for SCUBA-2 (the Submillimeter Common-User Bolometer Array) have been fabricated and tested. The pixel count (1280) of these wafer-scale imagers is significantly larger than any other low-temperature detectors produced to date, and represents a major step forward for the low-temperature detector community. These transition-edge-sensor (TES) based imagers utilize several innovations including in-focal-plane superconducting quantum intereference device (SQUID) multiplexers, micromachined Si block absorbers, and superconducting wafer hybridization. In this paper, we review the fabrication processes developed for these imagers and present recent optical data from a prototype imaging subarray.

Original languageEnglish
Pages (from-to)513-515
Number of pages3
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Issue number2
Publication statusPublished - 14 Apr 2006


  • Imaging array
  • SQUID multiplexer
  • Transition edge sensor


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