Extraction of sheet resistance and linewidth from all-copper ECD test structures fabricated from silicon preforms

B. J.R. Shulver*, A. S. Bunting, A. M. Gundlach, L. I. Haworth, A. W.S. Ross, S. Smith, A. J. Snell, J. T.M. Stevenson, A. J. Walton, R. A. Allen, M. W. Cresswell

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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