Electron-beam induced conduction in a ruthenium carbonyl nanoparticle polymer

MDR Thomas, H Ahmed, KM Sanderson, DS Shephard, BFG Johnson, Wuzong Zhou

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

A polymer composed of ruthenium carbonyl and of the formula [Ru6C(CO)(15)Ph2PCCPPh2](n) has been synthesized. It is found to behave as a negative electron-beam resist with a sensitivity of 400 C/m(2). Upon exposure to the electron beam, the electrical conductivity of the patterned films is found to vary over seven orders of magnitude according to a power-law dependence on dose. Temperature dependence of the conductivity is studied, and the conduction is attributed to variable-range hopping between ruthenium superclusters in two dimensions. (C) 2000 American Institute of Physics. [S0003-6951(00)01913-6].

Original languageEnglish
Pages (from-to)1773-1775
JournalApplied Physics Letters
Volume76
Issue number13
DOIs
Publication statusPublished - 27 Mar 2000

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