Electron-beam induced conduction in a ruthenium carbonyl nanoparticle polymer

MDR Thomas; H Ahmed; KM Sanderson; DS Shephard; BFG Johnson; Wuzong Zhou

doi:10.1063/1.126163

Electron-beam induced conduction in a ruthenium carbonyl nanoparticle polymer

MDR Thomas, H Ahmed, KM Sanderson, DS Shephard, BFG Johnson, Wuzong Zhou

Research output: Contribution to journal › Article › peer-review

Abstract

A polymer composed of ruthenium carbonyl and of the formula [Ru6C(CO)(15)Ph2PCCPPh2](n) has been synthesized. It is found to behave as a negative electron-beam resist with a sensitivity of 400 C/m(2). Upon exposure to the electron beam, the electrical conductivity of the patterned films is found to vary over seven orders of magnitude according to a power-law dependence on dose. Temperature dependence of the conductivity is studied, and the conduction is attributed to variable-range hopping between ruthenium superclusters in two dimensions. (C) 2000 American Institute of Physics. [S0003-6951(00)01913-6].

Original language	English
Pages (from-to)	1773-1775
Journal	Applied Physics Letters
Volume	76
Issue number	13
DOIs	https://doi.org/10.1063/1.126163
Publication status	Published - 27 Mar 2000

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@article{139c9ab1bfc14e668cdb54ef933867f6,

title = "Electron-beam induced conduction in a ruthenium carbonyl nanoparticle polymer",

abstract = "A polymer composed of ruthenium carbonyl and of the formula [Ru6C(CO)(15)Ph2PCCPPh2](n) has been synthesized. It is found to behave as a negative electron-beam resist with a sensitivity of 400 C/m(2). Upon exposure to the electron beam, the electrical conductivity of the patterned films is found to vary over seven orders of magnitude according to a power-law dependence on dose. Temperature dependence of the conductivity is studied, and the conduction is attributed to variable-range hopping between ruthenium superclusters in two dimensions. (C) 2000 American Institute of Physics. [S0003-6951(00)01913-6].",

author = "MDR Thomas and H Ahmed and KM Sanderson and DS Shephard and BFG Johnson and Wuzong Zhou",

note = "Appl Phys Lett",

year = "2000",

month = mar,

day = "27",

doi = "10.1063/1.126163",

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pages = "1773--1775",

journal = "Applied Physics Letters",

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TY - JOUR

T1 - Electron-beam induced conduction in a ruthenium carbonyl nanoparticle polymer

AU - Thomas, MDR

AU - Ahmed, H

AU - Sanderson, KM

AU - Shephard, DS

AU - Johnson, BFG

AU - Zhou, Wuzong

N1 - Appl Phys Lett

PY - 2000/3/27

Y1 - 2000/3/27

N2 - A polymer composed of ruthenium carbonyl and of the formula [Ru6C(CO)(15)Ph2PCCPPh2](n) has been synthesized. It is found to behave as a negative electron-beam resist with a sensitivity of 400 C/m(2). Upon exposure to the electron beam, the electrical conductivity of the patterned films is found to vary over seven orders of magnitude according to a power-law dependence on dose. Temperature dependence of the conductivity is studied, and the conduction is attributed to variable-range hopping between ruthenium superclusters in two dimensions. (C) 2000 American Institute of Physics. [S0003-6951(00)01913-6].

AB - A polymer composed of ruthenium carbonyl and of the formula [Ru6C(CO)(15)Ph2PCCPPh2](n) has been synthesized. It is found to behave as a negative electron-beam resist with a sensitivity of 400 C/m(2). Upon exposure to the electron beam, the electrical conductivity of the patterned films is found to vary over seven orders of magnitude according to a power-law dependence on dose. Temperature dependence of the conductivity is studied, and the conduction is attributed to variable-range hopping between ruthenium superclusters in two dimensions. (C) 2000 American Institute of Physics. [S0003-6951(00)01913-6].

U2 - 10.1063/1.126163

DO - 10.1063/1.126163

M3 - Article

SN - 0003-6951

VL - 76

SP - 1773

EP - 1775

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 13

ER -

Electron-beam induced conduction in a ruthenium carbonyl nanoparticle polymer

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