Abstract
We present the design, the fabrication and the characterization of a tunable one-dimensional (1D) photonic crystal cavity (PCC) etched on two vertically-coupled GaAs nanobeams. A novel fabrication method which prevents their adhesion under capillary forces is introduced. We discuss a design to increase the flexibility of the structure and we demonstrate a large reversible and controllable electromechanical wavelength tuning (> 15 nm) of the cavity modes. (C) 2012 Optical Society of America
Original language | English |
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Pages (from-to) | 19255-19263 |
Number of pages | 9 |
Journal | Optics Express |
Volume | 20 |
Issue number | 17 |
DOIs | |
Publication status | Published - 13 Aug 2012 |
Keywords
- CAVITIES