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Effect of Annealing of Silver Electrodes on Photolithographically Fabricated Silicon Trenches for Photodetection Applications

Navid Azadgar, Nima Naderi, Mohamad Javad Eshraghi

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)5212-5217
Number of pages6
JournalJournal of Electronic Materials
Volume47
Issue number9
DOIs
Publication statusPublished - Sept 2018

Keywords

  • UV photodetectors
  • Annealing
  • Photolithography
  • Recessed electrodes
  • Silicon trenches

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