Edge emitting quantum cascade microlasers on InP with deeply etched one-dimensional photonic crystals

J. Semmel*, L. Naehle, Sven Höfling, A. Forchel

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

Edge emitting quantum cascade microlasers based on InP have been fabricated and investigated. Deeply etched Bragg mirrors have been manufactured at the end of the resonators, to reduce the mirror losses of short cavity devices. In order to achieve the required high aspect ratio, an optimized plasma dry etching process has been developed, which allows monolithic device fabrication in a single dry etching step. The short resonator length results in a large Fabry-Perot mode spacing, which leads to a single mode operation. A side mode suppression ratio of about 20 dB at 80 K has been observed. (c) 2007 American Institute of Physics.

Original languageEnglish
Article number071104
Number of pages3
JournalApplied Physics Letters
Volume91
Issue number7
DOIs
Publication statusPublished - 13 Aug 2007

Keywords

  • LASERS

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