Dielectric waveguide vertically coupled to all-silicon photodiodes operating at telecommunication wavelengths

Kapil Debnath*, Frederic Y. Gardes, Andrew P. Knights, Graham T. Reed, Thomas F. Krauss, Liam O'Faolain

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

We present a method for detecting light in the 1550 nm wavelength window based on a silicon nitride waveguide that is vertically coupled to a silicon photonic crystal cavity. The absorption in silicon arises from deep-levels created by ion implantation, thereby providing excellent CMOS compatibility. We demonstrate a responsivity of 0.108 A/W at -10 V reverse bias with a dark current of 9.4 nA. Our work demonstrates one of the smallest wavelength selective photodectors realised to date. By cascading such detectors we also demonstrate a two-channel demultiplexer.

Original languageEnglish
Article number171106
Number of pages4
JournalApplied Physics Letters
Volume102
Issue number17
DOIs
Publication statusPublished - Apr 2013

Keywords

  • Photoelectric conversion
  • Photonic crystal waveguides
  • Optical waveguides
  • Optical resonators
  • Silcon
  • Photonic crystals

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