Abstract
This paper describes the fabrication of the submillimetre band prototype detector array, which is destined for the James Clerk Maxwell Telescope. Each pixel in the 5120 element SCUBA-2 array (Submillimetre Common User Bolometer Array) consists of a/4 thick silicon brick suspended on. a silicon nitride membrane. The detector uses Transition Edge Sensors (TES) technology resulting in a 1017W (1 Hz bandwidth) sensitivity to incoming radiation.
Original language | English |
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Pages (from-to) | 115-119 |
Number of pages | 5 |
Journal | IEE Conference Publication |
Issue number | 2005-10812 |
Publication status | Published - 14 Nov 2005 |
Event | IEE Seminar and Exhibition on MEMS Sensor Technologies - London, United Kingdom Duration: 25 Apr 2005 → 25 Apr 2005 |