Design and fabrication of the SCUBA-2 detector for the JCM telescope

W. Parkes*, C. C. Dunare, A. J. Walton, J. G. Terry, J. T.M. Stevenson, A. S. Bunting, A. M. Gundlach, S. Smith, G. C. Hilton, K. D. Irwin, J. N. Ullom, W. D. Duncan, W. S. Holland, M. D. Audley, M. J. MacIntosh, M. Ellis, P. A.R. Ade, R. Sudiwala, E. Schulte

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

Abstract

This paper describes the fabrication of the submillimetre band prototype detector array, which is destined for the James Clerk Maxwell Telescope. Each pixel in the 5120 element SCUBA-2 array (Submillimetre Common User Bolometer Array) consists of a/4 thick silicon brick suspended on. a silicon nitride membrane. The detector uses Transition Edge Sensors (TES) technology resulting in a 1017W (1 Hz bandwidth) sensitivity to incoming radiation.

Original languageEnglish
Pages (from-to)115-119
Number of pages5
JournalIEE Conference Publication
Issue number2005-10812
Publication statusPublished - 14 Nov 2005
EventIEE Seminar and Exhibition on MEMS Sensor Technologies - London, United Kingdom
Duration: 25 Apr 200525 Apr 2005

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