Design and fabrication of high-efficiency fibre couplers for nanophotonic devices

D. M. Beggs, M. Ayre, D. F. G. Gallagher, T. F. Krauss

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

A dual waveguide heterostructure device that couples light from single mode optical fibres into nanophotonic devices with an overall modelled efficiency of 81% has been investigated. A four-stage taper design for the ridge waveguide which allows for a total device length of 610 mu m is described. The fabrication of the ridge waveguide using chemically-assisted ion-beam etching has been optimised. (c) 2007 Elsevier B.V. All rights reserved.

Original languageEnglish
Pages (from-to)1446-1449
Number of pages4
JournalMicroelectronic Engineering
Volume84
DOIs
Publication statusPublished - May 2007

Keywords

  • CAIBE
  • etching
  • indium phosphide
  • tapers
  • waveguides
  • GRATING COUPLERS
  • WAVE-GUIDES
  • MEMBRANE
  • SILICON
  • COMPACT

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