Design and fabrication of high-efficiency fibre couplers for nanophotonic devices

D. M. Beggs; M. Ayre; D. F. G. Gallagher; T. F. Krauss

doi:10.1016/j.mee.2007.01.073

Design and fabrication of high-efficiency fibre couplers for nanophotonic devices

D. M. Beggs, M. Ayre, D. F. G. Gallagher, T. F. Krauss

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

A dual waveguide heterostructure device that couples light from single mode optical fibres into nanophotonic devices with an overall modelled efficiency of 81% has been investigated. A four-stage taper design for the ridge waveguide which allows for a total device length of 610 mu m is described. The fabrication of the ridge waveguide using chemically-assisted ion-beam etching has been optimised. (c) 2007 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	1446-1449
Number of pages	4
Journal	Microelectronic Engineering
Volume	84
DOIs	https://doi.org/10.1016/j.mee.2007.01.073
Publication status	Published - May 2007

Keywords

CAIBE
etching
indium phosphide
tapers
waveguides
GRATING COUPLERS
WAVE-GUIDES
MEMBRANE
SILICON
COMPACT

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10.1016/j.mee.2007.01.073

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title = "Design and fabrication of high-efficiency fibre couplers for nanophotonic devices",

abstract = "A dual waveguide heterostructure device that couples light from single mode optical fibres into nanophotonic devices with an overall modelled efficiency of 81% has been investigated. A four-stage taper design for the ridge waveguide which allows for a total device length of 610 mu m is described. The fabrication of the ridge waveguide using chemically-assisted ion-beam etching has been optimised. (c) 2007 Elsevier B.V. All rights reserved.",

keywords = "CAIBE, etching, indium phosphide, tapers, waveguides, GRATING COUPLERS, WAVE-GUIDES, MEMBRANE, SILICON, COMPACT",

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year = "2007",

month = may,

doi = "10.1016/j.mee.2007.01.073",

language = "English",

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journal = "Microelectronic Engineering",

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AU - Beggs, D. M.

AU - Ayre, M.

AU - Gallagher, D. F. G.

AU - Krauss, T. F.

PY - 2007/5

Y1 - 2007/5

N2 - A dual waveguide heterostructure device that couples light from single mode optical fibres into nanophotonic devices with an overall modelled efficiency of 81% has been investigated. A four-stage taper design for the ridge waveguide which allows for a total device length of 610 mu m is described. The fabrication of the ridge waveguide using chemically-assisted ion-beam etching has been optimised. (c) 2007 Elsevier B.V. All rights reserved.

AB - A dual waveguide heterostructure device that couples light from single mode optical fibres into nanophotonic devices with an overall modelled efficiency of 81% has been investigated. A four-stage taper design for the ridge waveguide which allows for a total device length of 610 mu m is described. The fabrication of the ridge waveguide using chemically-assisted ion-beam etching has been optimised. (c) 2007 Elsevier B.V. All rights reserved.

KW - CAIBE

KW - etching

KW - indium phosphide

KW - tapers

KW - waveguides

KW - GRATING COUPLERS

KW - WAVE-GUIDES

KW - MEMBRANE

KW - SILICON

KW - COMPACT

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DO - 10.1016/j.mee.2007.01.073

M3 - Article

SN - 0167-9317

VL - 84

SP - 1446

EP - 1449

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

Design and fabrication of high-efficiency fibre couplers for nanophotonic devices

Abstract

Keywords

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