Abstract
The deposition of MSe (M= Cd, Zn) films by low pressure chemical vapor deposition from air stable single-source precursors, was analyzed. The thermogravimetric analysis of cadmium and zinc showed that the precursors were volatile and began to evaporate at 375°C. It was found using gas chromatography and mass spectrometry experiments that the use of methyl(n-hexyl) derivatives instead of symmetric alkyl hindered the formation of diethyldiselenide. The observed color of Zinc selenide films produced at 525°C was dark orange and the film was transparent.
| Original language | English |
|---|---|
| Pages (from-to) | 187-189 |
| Number of pages | 3 |
| Journal | Chemical Vapor Deposition |
| Volume | 8 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 1 Sept 2002 |
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