Deposition of II-VI thin films by LP-MOCVD using novel single-source precursors

Thin films of several zinc or cadmium chalcogenides have been deposited on glass substrates by low pressure metal-organic chemical vapour deposition (LP-MOCVD) using single-source precursors, [M{(EPiPr(2))(2)N}(2)] (M = Cd-II, Zn-II and E = S, Se). X-ray single crystal structures show that [Zn{(EPiPr(2))(2)N}(2)] (E = S or Se) and [Zn{(SePPh2)(2)N}(2)] are tetrahedrally distorted. TGA analyses showed that the precursors are volatile, making them suitable for MOCVD studies. As-deposited films were polycrystalline as confirmed by X-ray powder diffraction (XRPD) and their morphologies were studied by scanning electron microscope (SEM).