Deposition of II-VI thin films by LP-MOCVD using novel single-source precursors

M  Afzaal; D  Crouch; M A  Malik; M  Motevalli; P  O'Brien; J H  Park; J D  Woollins

doi:10.1002/ejic.200300101

Deposition of II-VI thin films by LP-MOCVD using novel single-source precursors

M Afzaal, D Crouch, M A Malik, M Motevalli, P O'Brien, J H Park, J D Woollins

Research output: Contribution to journal › Article › peer-review

Abstract

Thin films of several zinc or cadmium chalcogenides have been deposited on glass substrates by low pressure metal-organic chemical vapour deposition (LP-MOCVD) using single-source precursors, [M{(EPiPr(2))(2)N}(2)] (M = Cd-II, Zn-II and E = S, Se). X-ray single crystal structures show that [Zn{(EPiPr(2))(2)N}(2)] (E = S or Se) and [Zn{(SePPh2)(2)N}(2)] are tetrahedrally distorted. TGA analyses showed that the precursors are volatile, making them suitable for MOCVD studies. As-deposited films were polycrystalline as confirmed by X-ray powder diffraction (XRPD) and their morphologies were studied by scanning electron microscope (SEM).

Original language	English
Pages (from-to)	171-177
Number of pages	7
Journal	European Journal of Inorganic Chemistry
Issue number	1
DOIs	https://doi.org/10.1002/ejic.200300101
Publication status	Published - 5 Jan 2004

Keywords

chemical vapour deposition
chalcogens
zinc
cadmium
RAY CRYSTAL-STRUCTURES
THERMAL-DECOMPOSITION
VAPOR-DEPOSITION
COMPLEXES
CADMIUM
ZINC
CHEMISTRY
LIGAND
CD

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10.1002/ejic.200300101

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@article{10d66a0a267b4d89bf20770842d48f6a,

title = "Deposition of II-VI thin films by LP-MOCVD using novel single-source precursors",

abstract = "Thin films of several zinc or cadmium chalcogenides have been deposited on glass substrates by low pressure metal-organic chemical vapour deposition (LP-MOCVD) using single-source precursors, [M{(EPiPr(2))(2)N}(2)] (M = Cd-II, Zn-II and E = S, Se). X-ray single crystal structures show that [Zn{(EPiPr(2))(2)N}(2)] (E = S or Se) and [Zn{(SePPh2)(2)N}(2)] are tetrahedrally distorted. TGA analyses showed that the precursors are volatile, making them suitable for MOCVD studies. As-deposited films were polycrystalline as confirmed by X-ray powder diffraction (XRPD) and their morphologies were studied by scanning electron microscope (SEM).",

keywords = "chemical vapour deposition, chalcogens, zinc, cadmium, RAY CRYSTAL-STRUCTURES, THERMAL-DECOMPOSITION, VAPOR-DEPOSITION, COMPLEXES, CADMIUM, ZINC, CHEMISTRY, LIGAND, CD",

author = "M Afzaal and D Crouch and Malik, {M A} and M Motevalli and P O'Brien and Park, {J H} and Woollins, {J D}",

year = "2004",

month = jan,

day = "5",

doi = "10.1002/ejic.200300101",

language = "English",

pages = "171--177",

journal = "European Journal of Inorganic Chemistry",

issn = "1434-1948",

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T1 - Deposition of II-VI thin films by LP-MOCVD using novel single-source precursors

AU - Afzaal, M

AU - Crouch, D

AU - Malik, M A

AU - Motevalli, M

AU - O'Brien, P

AU - Park, J H

AU - Woollins, J D

PY - 2004/1/5

Y1 - 2004/1/5

N2 - Thin films of several zinc or cadmium chalcogenides have been deposited on glass substrates by low pressure metal-organic chemical vapour deposition (LP-MOCVD) using single-source precursors, [M{(EPiPr(2))(2)N}(2)] (M = Cd-II, Zn-II and E = S, Se). X-ray single crystal structures show that [Zn{(EPiPr(2))(2)N}(2)] (E = S or Se) and [Zn{(SePPh2)(2)N}(2)] are tetrahedrally distorted. TGA analyses showed that the precursors are volatile, making them suitable for MOCVD studies. As-deposited films were polycrystalline as confirmed by X-ray powder diffraction (XRPD) and their morphologies were studied by scanning electron microscope (SEM).

AB - Thin films of several zinc or cadmium chalcogenides have been deposited on glass substrates by low pressure metal-organic chemical vapour deposition (LP-MOCVD) using single-source precursors, [M{(EPiPr(2))(2)N}(2)] (M = Cd-II, Zn-II and E = S, Se). X-ray single crystal structures show that [Zn{(EPiPr(2))(2)N}(2)] (E = S or Se) and [Zn{(SePPh2)(2)N}(2)] are tetrahedrally distorted. TGA analyses showed that the precursors are volatile, making them suitable for MOCVD studies. As-deposited films were polycrystalline as confirmed by X-ray powder diffraction (XRPD) and their morphologies were studied by scanning electron microscope (SEM).

KW - chemical vapour deposition

KW - chalcogens

KW - zinc

KW - cadmium

KW - RAY CRYSTAL-STRUCTURES

KW - THERMAL-DECOMPOSITION

KW - VAPOR-DEPOSITION

KW - COMPLEXES

KW - CADMIUM

KW - ZINC

KW - CHEMISTRY

KW - LIGAND

KW - CD

UR - http://www.scopus.com/inward/record.url?scp=1642430613&partnerID=8YFLogxK

U2 - 10.1002/ejic.200300101

DO - 10.1002/ejic.200300101

M3 - Article

SN - 1434-1948

SP - 171

EP - 177

JO - European Journal of Inorganic Chemistry

JF - European Journal of Inorganic Chemistry

IS - 1

ER -

Deposition of II-VI thin films by LP-MOCVD using novel single-source precursors

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Keywords

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