Deposition of II-VI thin films by LP-MOCVD using novel single-source precursors

M Afzaal, D Crouch, M A Malik, M Motevalli, P O'Brien, J H Park, J D Woollins

Research output: Contribution to journalArticlepeer-review

78 Citations (Scopus)

Abstract

Thin films of several zinc or cadmium chalcogenides have been deposited on glass substrates by low pressure metal-organic chemical vapour deposition (LP-MOCVD) using single-source precursors, [M{(EPiPr(2))(2)N}(2)] (M = Cd-II, Zn-II and E = S, Se). X-ray single crystal structures show that [Zn{(EPiPr(2))(2)N}(2)] (E = S or Se) and [Zn{(SePPh2)(2)N}(2)] are tetrahedrally distorted. TGA analyses showed that the precursors are volatile, making them suitable for MOCVD studies. As-deposited films were polycrystalline as confirmed by X-ray powder diffraction (XRPD) and their morphologies were studied by scanning electron microscope (SEM).

Original languageEnglish
Pages (from-to)171-177
Number of pages7
JournalEuropean Journal of Inorganic Chemistry
Issue number1
DOIs
Publication statusPublished - 5 Jan 2004

Keywords

  • chemical vapour deposition
  • chalcogens
  • zinc
  • cadmium
  • RAY CRYSTAL-STRUCTURES
  • THERMAL-DECOMPOSITION
  • VAPOR-DEPOSITION
  • COMPLEXES
  • CADMIUM
  • ZINC
  • CHEMISTRY
  • LIGAND
  • CD

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