Conformal oxide coating of carbon nanotubes

S. Kawasaki; G. Catalan; H. J. Fan; M. M. Saad; J. M. Gregg; M. A. Correa-Duarte; J. Rybczynski; F. D. Morrison; T. Tatsuta; O. Tsuji; J. F. Scott

doi:10.1063/1.2841710

Conformal oxide coating of carbon nanotubes

S. Kawasaki, G. Catalan, H. J. Fan, M. M. Saad, J. M. Gregg, M. A. Correa-Duarte, J. Rybczynski, F. D. Morrison, T. Tatsuta, O. Tsuji, J. F. Scott

Research output: Contribution to journal › Article › peer-review

Abstract

The International Roadmap for Ferroelectric Memories requires three-dimensional integration of high-dielectric materials onto metal interconnects or bottom electrodes by 2010. Here, we demonstrate the possibility of conformally coating carbon nanotubes with high-dielectric oxide as a first step toward ultrahigh integration density of three-dimensional ferroelectric random access memories. (C) 2008 American Institute of Physics.

Original language	English
Article number	053109
Number of pages	3
Journal	Applied Physics Letters
Volume	92
Issue number	5
DOIs	https://doi.org/10.1063/1.2841710
Publication status	Published - 4 Feb 2008

Keywords

THIN-FILMS
ARRAYS
FABRICATION
TEMPLATES

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title = "Conformal oxide coating of carbon nanotubes",

abstract = "The International Roadmap for Ferroelectric Memories requires three-dimensional integration of high-dielectric materials onto metal interconnects or bottom electrodes by 2010. Here, we demonstrate the possibility of conformally coating carbon nanotubes with high-dielectric oxide as a first step toward ultrahigh integration density of three-dimensional ferroelectric random access memories. (C) 2008 American Institute of Physics.",

keywords = "THIN-FILMS, ARRAYS, FABRICATION, TEMPLATES",

author = "S. Kawasaki and G. Catalan and Fan, \{H. J.\} and Saad, \{M. M.\} and Gregg, \{J. M.\} and Correa-Duarte, \{M. A.\} and J. Rybczynski and Morrison, \{F. D.\} and T. Tatsuta and O. Tsuji and Scott, \{J. F.\}",

year = "2008",

month = feb,

day = "4",

doi = "10.1063/1.2841710",

language = "English",

volume = "92",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

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TY - JOUR

T1 - Conformal oxide coating of carbon nanotubes

AU - Kawasaki, S.

AU - Catalan, G.

AU - Fan, H. J.

AU - Saad, M. M.

AU - Gregg, J. M.

AU - Correa-Duarte, M. A.

AU - Rybczynski, J.

AU - Morrison, F. D.

AU - Tatsuta, T.

AU - Tsuji, O.

AU - Scott, J. F.

PY - 2008/2/4

Y1 - 2008/2/4

N2 - The International Roadmap for Ferroelectric Memories requires three-dimensional integration of high-dielectric materials onto metal interconnects or bottom electrodes by 2010. Here, we demonstrate the possibility of conformally coating carbon nanotubes with high-dielectric oxide as a first step toward ultrahigh integration density of three-dimensional ferroelectric random access memories. (C) 2008 American Institute of Physics.

AB - The International Roadmap for Ferroelectric Memories requires three-dimensional integration of high-dielectric materials onto metal interconnects or bottom electrodes by 2010. Here, we demonstrate the possibility of conformally coating carbon nanotubes with high-dielectric oxide as a first step toward ultrahigh integration density of three-dimensional ferroelectric random access memories. (C) 2008 American Institute of Physics.

KW - THIN-FILMS

KW - ARRAYS

KW - FABRICATION

KW - TEMPLATES

UR - https://www.scopus.com/pages/publications/38949101146

UR - http://link.aip.org/link/?APPLAB/92/053109/1

U2 - 10.1063/1.2841710

DO - 10.1063/1.2841710

M3 - Article

SN - 0003-6951

VL - 92

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 5

M1 - 053109

ER -

Conformal oxide coating of carbon nanotubes

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