Conformal oxide coating of carbon nanotubes

S. Kawasaki, G. Catalan, H. J. Fan, M. M. Saad, J. M. Gregg, M. A. Correa-Duarte, J. Rybczynski, F. D. Morrison, T. Tatsuta, O. Tsuji, J. F. Scott

Research output: Contribution to journalArticlepeer-review

37 Citations (Scopus)

Abstract

The International Roadmap for Ferroelectric Memories requires three-dimensional integration of high-dielectric materials onto metal interconnects or bottom electrodes by 2010. Here, we demonstrate the possibility of conformally coating carbon nanotubes with high-dielectric oxide as a first step toward ultrahigh integration density of three-dimensional ferroelectric random access memories. (C) 2008 American Institute of Physics.

Original languageEnglish
Article number053109
Number of pages3
JournalApplied Physics Letters
Volume92
Issue number5
DOIs
Publication statusPublished - 4 Feb 2008

Keywords

  • THIN-FILMS
  • ARRAYS
  • FABRICATION
  • TEMPLATES

Fingerprint

Dive into the research topics of 'Conformal oxide coating of carbon nanotubes'. Together they form a unique fingerprint.

Cite this