Abstract
We present high-efficiency grating couplers for coupling between a single-mode fiber and nanophotonic waveguides, fabricated both in silicon-on-insulator (SOI) and InP membranes using BenzoCycloButene wafer bonding. The coupling efficiency is substantially increased by adding a gold bottom mirror to the structures. The measured coupling efficiency to fiber is 69% for SOI grating couplers and 56% for bonded InP membrane grating couplers.
Original language | English |
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Pages (from-to) | 151-156 |
Number of pages | 6 |
Journal | IEEE Journal of Lightwave Technology |
Volume | 25 |
DOIs | |
Publication status | Published - Jan 2007 |
Keywords
- BenzoCycloButene (BCB) wafer bonding
- gold mirror
- grating couplers
- integrated optics
- MEMBRANE