Chemical vapour deposition of diamond: An in situ study by vibrational spectroscopy

A Heerwagen, M Strobel, M Himmelhaus, Manfred Buck

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)6732-6733
Number of pages2
JournalJournal of the American Chemical Society
Volume123
DOIs
Publication statusPublished - 11 Jul 2001

Keywords

  • FREQUENCY-GENERATION SPECTROSCOPY
  • ATOMIC-HYDROGEN
  • H-ATOMS
  • SURFACE
  • GROWTH
  • REACTOR
  • CH3
  • TEMPERATURE
  • SIMULATION
  • ACETYLENE

Cite this