Calibration of the normal spring constant of microcantilevers in a parallel fluid flow

We demonstrate a novel approach to determine the normal spring constant of microcantilevers. The cantilevers are placed parallel to a fluid flow thus establishing one of the walls of the flow channel. Resonance frequencies are recorded depending on the velocity of the fluid. The pressure gradient resulting from the flow causes the resonance frequency to change. This change can be exploited to deduce the cantilever spring constant with high precision. The method we present can be performed in situ and does not involve any contact of the cantilever with a surface thus having great potential for the calibration of modified probes and for being incorporated in microfluidic systems. In case the spring constant is known, the setup can also be employed to determine the velocity of fluid flows and the flow rate with high precision and up to high speeds. (c) 2007 American Institute of Physics.