Atmospheric adsorption effects in hot-wire chemical-vapor-deposition microcrystalline silicon films with different electrode configurations

S. K. Persheyev; V. Smirnov; K. A. O'Neill; S. Reynolds; M. J. Rose

Atmospheric adsorption effects in hot-wire chemical-vapor-deposition microcrystalline silicon films with different electrode configurations

S. K. Persheyev, V. Smirnov, K. A. O'Neill, S. Reynolds, M. J. Rose

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	361-364
Number of pages	4
Journal	Fizika i Tekhnika Poluprovodnikov
Volume	39
Issue number	3
Publication status	Published - 2005

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@article{33188a756a184aa98311b10234ff36bf,

title = "Atmospheric adsorption effects in hot-wire chemical-vapor-deposition microcrystalline silicon films with different electrode configurations",

author = "Persheyev, \{S. K.\} and V. Smirnov and O'Neill, \{K. A.\} and S. Reynolds and Rose, \{M. J.\}",

year = "2005",

language = "English",

volume = "39",

pages = "361--364",

journal = "Fizika i Tekhnika Poluprovodnikov",

issn = "0015-3222",

publisher = "Fiziko-Tehniceskij Institut im. A.F. Ioffe RAN",

number = "3",

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TY - JOUR

T1 - Atmospheric adsorption effects in hot-wire chemical-vapor-deposition microcrystalline silicon films with different electrode configurations

AU - Persheyev, S. K.

AU - Smirnov, V.

AU - O'Neill, K. A.

AU - Reynolds, S.

AU - Rose, M. J.

PY - 2005

Y1 - 2005

UR - https://www.scopus.com/pages/publications/24044510470

M3 - Article

AN - SCOPUS:24044510470

SN - 0015-3222

VL - 39

SP - 361

EP - 364

JO - Fizika i Tekhnika Poluprovodnikov

JF - Fizika i Tekhnika Poluprovodnikov

IS - 3

ER -

Atmospheric adsorption effects in hot-wire chemical-vapor-deposition microcrystalline silicon films with different electrode configurations

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