A high-precision silicon-on-insulator position sensor

Paul Beck*, Laura C. Wynne, Simone Iadanza, Liam O’Faolain, Sebastian A. Schulz, Peter Banzer

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


Integrated photonic devices provide significant advantages over their conventional counterparts, such as a drastically reduced footprint as well as compatibility with other photonic or electronic circuitry. In this work, we present a high-precision optical position sensor fabricated on a silicon-on-insulator platform. The sensor relies on the principle of position-dependent directional waveguide coupling upon excitation of a monolithically integrated scatterer with a tightly focused polarization-tailored beam. We demonstrate a spatial resolution of 7.2 nm, corresponding to approximately λ/200.
Original languageEnglish
Article number046113
Number of pages7
JournalAPL Photonics
Issue number4
Publication statusPublished - 24 Apr 2023


  • Computer Networks and Communications
  • Atomic and Molecular Physics, and Optics


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