A high-precision silicon-on-insulator position sensor

Paul Beck; Laura C. Wynne; Simone Iadanza; Liam O’Faolain; Sebastian A. Schulz; Peter Banzer

doi:10.1063/5.0133968

A high-precision silicon-on-insulator position sensor

Paul Beck^*, Laura C. Wynne, Simone Iadanza, Liam O’Faolain, Sebastian A. Schulz, Peter Banzer

^*Corresponding author for this work

School of Physics and Astronomy

Research output: Contribution to journal › Article › peer-review

Abstract

Integrated photonic devices provide significant advantages over their conventional counterparts, such as a drastically reduced footprint as well as compatibility with other photonic or electronic circuitry. In this work, we present a high-precision optical position sensor fabricated on a silicon-on-insulator platform. The sensor relies on the principle of position-dependent directional waveguide coupling upon excitation of a monolithically integrated scatterer with a tightly focused polarization-tailored beam. We demonstrate a spatial resolution of 7.2 nm, corresponding to approximately λ/200.

Original language	English
Article number	046113
Number of pages	7
Journal	APL Photonics
Volume	8
Issue number	4
DOIs	https://doi.org/10.1063/5.0133968
Publication status	Published - 24 Apr 2023

Keywords

Computer Networks and Communications
Atomic and Molecular Physics, and Optics

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10.1063/5.0133968Licence: CC BY

Beck_2023_APL_High-precision_CC
Copyright © 2023 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
Final published version, 7.5 MBLicence: CC BY

Cite this

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abstract = "Integrated photonic devices provide significant advantages over their conventional counterparts, such as a drastically reduced footprint as well as compatibility with other photonic or electronic circuitry. In this work, we present a high-precision optical position sensor fabricated on a silicon-on-insulator platform. The sensor relies on the principle of position-dependent directional waveguide coupling upon excitation of a monolithically integrated scatterer with a tightly focused polarization-tailored beam. We demonstrate a spatial resolution of 7.2 nm, corresponding to approximately λ/200.",

keywords = "Computer Networks and Communications, Atomic and Molecular Physics, and Optics",

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AU - Beck, Paul

AU - Wynne, Laura C.

AU - Iadanza, Simone

AU - O’Faolain, Liam

AU - Schulz, Sebastian A.

AU - Banzer, Peter

PY - 2023/4/24

Y1 - 2023/4/24

N2 - Integrated photonic devices provide significant advantages over their conventional counterparts, such as a drastically reduced footprint as well as compatibility with other photonic or electronic circuitry. In this work, we present a high-precision optical position sensor fabricated on a silicon-on-insulator platform. The sensor relies on the principle of position-dependent directional waveguide coupling upon excitation of a monolithically integrated scatterer with a tightly focused polarization-tailored beam. We demonstrate a spatial resolution of 7.2 nm, corresponding to approximately λ/200.

AB - Integrated photonic devices provide significant advantages over their conventional counterparts, such as a drastically reduced footprint as well as compatibility with other photonic or electronic circuitry. In this work, we present a high-precision optical position sensor fabricated on a silicon-on-insulator platform. The sensor relies on the principle of position-dependent directional waveguide coupling upon excitation of a monolithically integrated scatterer with a tightly focused polarization-tailored beam. We demonstrate a spatial resolution of 7.2 nm, corresponding to approximately λ/200.

KW - Computer Networks and Communications

KW - Atomic and Molecular Physics, and Optics

U2 - 10.1063/5.0133968

DO - 10.1063/5.0133968

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VL - 8

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JF - APL Photonics

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M1 - 046113

ER -

A high-precision silicon-on-insulator position sensor

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